What does "microlithography" mean?

Any of several techniques for the production of microscale devices; especially the production of semiconductor devices using beams of photons or electrons.

Microlithography

noun

noun ·Rare ·Advanced level

Definitions

Noun

1
Any of several techniques for the production of microscale devices; especially the production of semiconductor devices using beams of photons or electrons. uncountable

Etymology

From micro- + lithography.

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Data sourced from Wiktionary, WordNet, CMU, and other open linguistic databases. Updated March 2026.