Octafluorocyclobutane

noun

noun ·Rare ·Advanced level

Definitions

Noun
  1. 1
    The organofluorine compound C₄F₈, related to cyclobutane by replacement of all C–H bonds with C–F bonds, and used as a deposition gas and etchant in semiconductor manufacture. uncountable

Etymology

From octa- + fluoro- + cyclobutane.

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Data sourced from Wiktionary, WordNet, CMU, and other open linguistic databases. Updated March 2026.