Octafluorocyclobutane
noun
noun ·Rare ·Advanced level
Definitions
Noun
- 1 The organofluorine compound C₄F₈, related to cyclobutane by replacement of all C–H bonds with C–F bonds, and used as a deposition gas and etchant in semiconductor manufacture. uncountable
Etymology
From octa- + fluoro- + cyclobutane.
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Data sourced from Wiktionary, WordNet, CMU, and other open linguistic databases. Updated March 2026.