Subfab
noun
noun ·Rare ·Advanced level
Definitions
Noun
- 1 The area underneath a semiconductor fabrication plant
"Line A involved a 121,000 ft 2 area, with downdraft laminar flow and flow-through ventilation from fab to subfab areas; the facility uses an open bay and chase design, such that SEGs may overlap within process bays or maintenance chases."
Example
More examples"Line A involved a 121,000 ft 2 area, with downdraft laminar flow and flow-through ventilation from fab to subfab areas; the facility uses an open bay and chase design, such that SEGs may overlap within process bays or maintenance chases."
Etymology
From sub- + fab.
More for "subfab"
Data sourced from Wiktionary, WordNet, CMU, and other open linguistic databases. Updated March 2026.